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1200℃双温区CVD系统_CVD实验管式炉

责任编辑:未知 发布时间:2019-12-26  点击数:  

1200℃双温区CVD系统介绍:

万豪娱乐 QIXIANGHUAXUECHENJIXITONG(CVDGUANSHILU)SHILIYONGQITAIHUAHEWUHUOHUAHEWUDEHUNHEWUZAIJITISHOUREMIANSHANGFASHENGHUAXUEFANYING,CONGERZAIJITIBIAOMIANSHANGSHENGCHENGBUHUIFATUCENGDEYIZHONGBOMOCAILIAOZHIBEIXITONG,TAYOUZHENKONGGUANSHILU,DUOTONGDAOQILUXITONGHEZHENKONGXITONGZUCHENG。SHIYONGYUCVDGONGYI,RUTANHUAGUIDUMO、TAOCIJIPIANDAODIANLVCESHI、ZnONAMIJIEGOUDEKEKONGSHENGZHANG、TANNAMIGUANSHENGZHANG、SHIMOXICAILIAOZHIBEI、TAOCIDIANRONG(MLCC)QIFENSHAOJIEDENGSHIYAN。


万豪娱乐 SGM 双温区CVD管式炉设计有两个温区,采用双层壳体结构和智能化程序控温系统,移相触发、可控硅控制,炉膛采用氧化铝多晶体纤维材料,双层炉壳间配有风冷系统,具有真空装置,可以通气氛抽真空,真空泵可以根据客户要求的真空度选配,该炉具有温场均衡、表面温度低、升降温度速率快、节能等优点。

GUANSHILUZHUYAOTONGGUOCHENGXUZIDONG*KONGWENLAISHIXIANCVD、PVDHETUIHUOCHULIDENGSHIYANSHOUDUAN,BINGQIEKEYITONGGUOHUAGUISHIXIANKUAISUJIANGWEN。SHUANGWENQUHUAGUILUGUIGECANSHU:

万豪娱乐 PEIZHI:SHUANGWENQUHUAGUIGUANSHILUYITAO(DAISANLULIULIANGKONGZHIXITONGYITAODANQI500sccm,YAQI500sccm,QINGQI50sccm),KF25CHOUQIKOUZHENKONGBENGYITAO,FALANGAIZHUANG(LIANGDUANQUANBUGAIZHUANG,MEIDUANSANGECHUQIKOUQIZHONGBAOKUOKF25CHOUQIJIEKOU,1/4,JIEKOUCHUQIKOU,YIJIZHENKONGYALIBIAOCHUQIKOUHEBAOTACHOUQIJIEKOU)

SGM 双温区CVD管式炉主要功能和特点:

1、QIAOTIJIEGOU:SHUANGCENGQIAOTIJIEGOU,BINGDAIYOUFENGLENGXITONG,SHIDEQIAOTIBIAOMIANDEWENDUXIAOYU60DU;LUTANGBAOWENCAILIAOCAIYONGGAOCHUNYANGHUALVDUOJINGXIANWEI,JIANSHAORELIANGDESUNSHI;NEILUTANGBIAOMIANTUYOUMEIGUOJINKOU1750DUGAOWENYANGHUALVTUCENGKEYITIGAOFANSHELVJISHEBEIDEJIAREXIAOLV,TONGSHIYEKEYIYANZHANGYIQIDESHIYONGSHOUMING

万豪娱乐 2、GONGLV:2.5KW

3、DIANYA:AC220V50Hz/60Hz

万豪娱乐 4、GONGZUOWENDU:*GAO1200℃(<1h),LIANXUGONGZUO1100℃

5、SHENGJIANGWENSULV:20℃/min

6、KONGWENJINGDU:±1℃

7、ZHENKONGDU:10-2torr(JIXIEBENG),10-5torr(FENZIBENG)

8、LOUQILV:<5mtorr/min

9、SHENGWENSULV:≤10℃/min

万豪娱乐 10、LUGUANCHICUNHEFALAN:CHUNDU99.8%DEGAOCHUNSHIYINGGUAN;BAOKUOBUXIUGANGZHENKONGMIFENGFALAN,ZHENFA,HEYALIBIAO

11、KUOZHANJIEKOU:BIAOPEIKF25adapterZHUANJIETOU;BIAOPEIVCRSHUANGKATAOJIETOU,LUZILIANGDUANZHUANGYOUFALANZHIJIAZHIJIAZHANGDUGENJULUGUANCHICUNDINGZUO!(FEIBIAODINGZHI)

12、WENKONGXITONG:PIDZHINENGHUAWENDUKONGZHIQI,KEYISHEZHI30DUANSHENGJIANGWENCHENGXU;MEIGEWENQUKEYIDULIDESHEZHI,DAIYOUGUOREHEDUANOUBAOHU

万豪娱乐 13、KONGZHIFANGFA:PIDZIDONGKONGZHI

 

万豪娱乐 SHUANGWENQUCVDGUANSHILUYOUCHENGSHUANGWENQUGUANSHITIDULU,SHUANGWENQUGUANSHITIDULUZHUANMENSHEJIYONGYUYOUWENDUTIDUYAOQIUDECVDGONGYI。LIANGGEWENQUDULIKONGZHI,WENQUKEDANDUSHIYONG。SGM CVDGUANSHILUCAIYONGSHUANGCENGQIAOTIJIEGOU,ZHINENGHUACHENGXUKONGWENXITONG,KEKONGGUIKONGZHI,KONGWENJINGDUGAO;NEIZHILIANGGEWENQU,KEYIYINGZAOBUTONGDEWENDUTIDU。

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